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1

Pulsed-DC Discharge for Plasma CVD of Carbon Thin Films

Mamun, Md Abdullah Al, Furuta, Hiroshi, Hatta, Akimitsu

Journal:

IEEE Transactions on Plasma Science

Year:

2018

Language:

english

File:

PDF, 1.66 MB

english, 2018

2

Initial Stage of Bias-Enhanced Diamond Nucleation Induced by Microwave Plasma

Yagi, Hiromasa, Hoshina, Kimihiko, Hatta, Akimitsu, Ito, Toshimichi, Sasaki, Takatomo, Hiraki, Akio

Journal:

Japanese Journal of Applied Physics

Year:

1997

Language:

english

File:

PDF, 334 KB

english, 1997

3

Hydrogen Permeation through Diamond-Like Carbon Thin Films Coated on PET Sheet

Akimitsu Hatta, Shikou Kaneko, Md. Kamrul Hassan

Journal:

Plasma Processes and Polymers

Year:

2007

Language:

english

File:

PDF, 165 KB

english, 2007

4

Two-dimensional modeling of electron cyclotron resonance plasma production

Yasaka, Yasuyoshi, Fukuyama, Atsushi, Hatta, Akimitsu, Itatani, Ryohei

Journal:

Journal of Applied Physics

Year:

1992

Language:

english

File:

PDF, 970 KB

english, 1992

5

X-ray reflectivity analysis on initial stage of diamond-like carbon film deposition on Si substrate by RF plasma CVD and on removal of the sub-surface layer by oxygen plasma etching

Harigai, Toru, Yasuoka, Yuki, Nitta, Noriko, Furuta, Hiroshi, Hatta, Akimitsu

Journal:

Diamond and Related Materials

Year:

2013

Language:

english

File:

PDF, 563 KB

english, 2013

6

Electron field emission from diamond-like carbon films after dielectric breakdown and from diamond films after the activation process

Inomoto, Hideo, Hatta, Akimitsu, Kawabata, Kunihara, Katoda, Takashi, Hiraki, Akio

Journal:

Diamond and Related Materials

Year:

2000

Language:

english

File:

PDF, 407 KB

english, 2000

7

Cathodoluminescence of boron-doped heteroepitaxial diamond films on platinum

Yokota, Yoshihiro, Tachibana, Takeshi, Miyata, Koichi, Hayashi, Kazushi, Kobashi, Koji, Hatta, Akimitsu, Ito, Toshimichi, Hiraki, Akio, Shintani, Yoshihiro

Journal:

Diamond and Related Materials

Year:

1999

Language:

english

File:

PDF, 326 KB

english, 1999

8

Effects of remote hydrogen plasma treatment (RHPT) on ion-implanted CVD diamond

Won, Jaihyung, Yagi, Hiromasa, Hatta, Akimitsu, Jiang, Nan, Ito, Toshimichi, Sasaki, Takatomo, Hiraki, Akio

Journal:

Diamond and Related Materials

Year:

1997

Language:

english

File:

PDF, 633 KB

english, 1997

9

Growth of AIN thin films on (111) and (100) silicon by pulsed laser deposition in nitrogen plasma ambient

Ogawa, Tetsuya, Okamoto, Mitsuo, Khin, Yap Yoke, Mori, Yusuke, Hatta, Akimitsu, Ito, Toshimichi, Sasaki, Takatomo, Hiraki, Akio

Journal:

Diamond and Related Materials

Year:

1997

Language:

english

File:

PDF, 877 KB

english, 1997

10

Ion implantation in CVD diamond and plasma treatment effect

Yagyu, Hiroyuki, Deguchi, Masahiro, Won, Jai Hyung, Mori, Yusuke, Hatta, Akimitsu, Kitabatake, Makoto, Ito, Toshimichi, Hirao, Takashi, Hiraki, Akio

Journal:

Diamond and Related Materials

Year:

1995

Language:

english

File:

PDF, 526 KB

english, 1995

11

Beam flux dependence of ion-irradiation-induced porous structures in III–V compound semiconductors

Nitta, Noriko, Hasegawa, Tokiya, Yasuda, Hidehiro, Sato, Koichi, Xu, Qiu, Yoshiie, Toshimasa, Taniwaki, Masafumi, Hatta, Akimitsu

Journal:

Radiation Effects and Defects in Solids

Year:

2013

Language:

english

File:

PDF, 401 KB

english, 2013

12

Localized DLC etching by a non-thermal atmospheric-pressure helium plasma jet in ambient air

Oh, Jun-Seok, Kakuta, Yoshiaki, Yasuoka, Yuki, Furuta, Hiroshi, Hatta, Akimitsu

Journal:

Diamond and Related Materials

Year:

2014

Language:

english

File:

PDF, 741 KB

english, 2014

13

Fabrication of Diamond Films at Low Pressure and Low-Temperature by Magneto-Active Microwave Plasma Chemical Vapor Deposition

Yara, Takuya, Yuasa, Motokazu, Shimizu, Manabu, Makita, Hiroshi, Hatta, Akimitsu, Suzuki, Jun-ichi, Ito, Toshimichi, Hiraki, Akio

Journal:

Japanese Journal of Applied Physics

Year:

1994

Language:

english

File:

PDF, 942 KB

english, 1994

14

Pulsed DC plasma CVD system for the deposition of DLC films

Mamun, Md Abdullah Al, Furuta, Hiroshi, Hatta, Akimitsu

Journal:

Materials Today Communications

Year:

2017

Language:

english

File:

PDF, 1.09 MB

english, 2017

15

DC Microplasma Jet for Local a:C-H Deposition Operated in SEM Chamber

Matra, Khanit, Furuta, Hiroshi, Hatta, Akimitsu

Journal:

Year:

2017

Language:

english

File:

PDF, 6.02 MB

english, 2017

16

Study of self-organized structure in carbon nanotube forest by fractal dimension and lacunarity analysis

Pander, Adam, Onishi, Takatsugu, Hatta, Akimitsu, Furuta, Hiroshi

Journal:

Materials Characterization

Year:

2020

File:

PDF, 3.75 MB

2020

17

Enhancement of diamond nucleation by applying substrate bias in ECR plasma chemical vapour deposition

Hyeongmin Jeon, Chongmu Lee, Akimitsu Hatta, Toshimichi Ito, Takatomo Sasaki, Akio Hiraki

Journal:

Year:

1998

Language:

english

File:

PDF, 403 KB

english, 1998

18

Large area diamond nucleation on Si(001) using magnetoactive microwave plasma CVD

Hyeongmin Jeon, Akimitsu Hatta, Hidetoshi Suzuki, Toshimichi Ito, Takatomo Sasaki, Chongmu Lee, Akio Hiraki

Journal:

Applied Surface Science

Year:

1997

Language:

english

File:

PDF, 418 KB

english, 1997

19

Remote hydrogen plasma treatment (RHPT) of ion implanted CVD diamond

Jaihyung Won, Hiromasa Yagi, Akimitsu Hatta, Nan Jiang, Toshimichi Ito, Takatomo Sasaki, Akio Hiraki

Journal:

Applied Surface Science

Year:

1997

Language:

english

File:

PDF, 476 KB

english, 1997

20

Electron emitter device of NEA diamond thin film

Akimitsu Hatta, Kenji Ogawa, Nobuhiro Eimori, Masahiro Deguchi, Makoto Kitabatake, Toshimichi Ito, Akio Hiraki

Journal:

Applied Surface Science

Year:

1997

Language:

english

File:

PDF, 411 KB

english, 1997

21

Cold Cathode of p-Type Semiconducting Diamond Films for Gas Discharge

Akimitsu Hatta, Hiroshi Nakatsuma, Keishi Yanai, Tsuyoshi Nishikawa

Journal:

Plasma Processes and Polymers

Year:

2007

Language:

english

File:

PDF, 177 KB

english, 2007

22

Electron Field Emission from Carbon Nanotubes in Ar Gas

Qin Zou, Akimitsu Hatta

Journal:

Plasma Processes and Polymers

Year:

2007

Language:

english

File:

PDF, 196 KB

english, 2007

23

DNA transposon fossils present on the conditionally dispensable chromosome controlling AF-toxin biosynthesis and pathogenicity ofAlternaria alternata

Rieko Hatta, Akihisa Shinjo, Sheila Ruswandi, Keiji Kitani, Mikihiro Yamamoto, Kazuya Akimitsu, Takashi Tsuge

Journal:

Journal of General Plant Pathology

Year:

2006

Language:

english

File:

PDF, 1.11 MB

english, 2006

24

Dissection of the host range of the fungal plant pathogen Alternaria alternata by modification of secondary metabolism

Kaoru Ito, Takayoshi Tanaka, Rieko Hatta, Mikihiro Yamamoto, Kazuya Akimitsu, Takashi Tsuge

Journal:

Molecular Microbiology

Year:

2004

Language:

english

File:

PDF, 456 KB

english, 2004

25

Electron microscopic analysis of chemical-vapour-deposited diamond surface by a novel method

Nan Jiang, Akimitsu Hatta, Jaihyung Won, Yusuke Mori, Toshimichi Ito, Takatomo Sasaki, Akio Hiraki

Journal:

Thin Solid Films

Year:

1996

Language:

english

File:

PDF, 738 KB

english, 1996

26

Diamond film growth by pulse-modulated magnetoactive microwave plasma chemical vapour deposition

Akimitsu Hatta, Hidetoshi Suzuki, Ken-ichi Kadota, Toshimichi Ito, Akio Hiraki

Journal:

Thin Solid Films

Year:

1996

Language:

english

File:

PDF, 339 KB

english, 1996

27

Investigation of distribution of defects and impurities in boron-doped CVD diamond film by cathodoluminescence spectroscopy

Chunlei Wang, Akimitsu Hatta, Nan Jiang, Jaihyung Won, Toshimichi Ito, Akio Hiraki, Zengsun Jin, Guangtian Zou

Journal:

Thin Solid Films

Year:

1997

Language:

english

File:

PDF, 391 KB

english, 1997

28

Defects in ion implanted diamond films (ESR study)

Yoshiyuki Show, Tomio Izumi, Masahiro Deguchi, Makoto Kitabatake, Takashi Hirao, Yusuke Morid, Akimitsu Hatta, Toshimichi Ito, Akio Hiraki

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

1997

Language:

english

File:

PDF, 359 KB

english, 1997

29

P-71: Synthesis and Photoluminescence Properties of Vertically Well-aligned Zinc Oxide Nanostructures

Chaoyang Li, Dapeng Wang, Toshiyuki Kawaharamura, Zeming Li, Noriko Nitta, Mamoru Furuta, Akimitsu Hatta

Journal:

SID Symposium Digest of Technical Papers

Year:

2012

Language:

english

File:

PDF, 686 KB

english, 2012

30

Synthesis of Au Nano-Particles Using Plasma Sputtering into Oil

Huijun Zhang, Masaru Murao, Tingshan Liu, Tooru Harigai, Kazuomi Kageyama, Dianzhong Wen, Akimitsu Hatta

Journal:

Physics Procedia

Year:

2012

Language:

english

File:

PDF, 827 KB

english, 2012

31

Electron field emission from carbon nanotubes in atmospheric pressure Ar gas

Zou, Qin, Wang, Ming-Zhi, Hatta, Akimitsu

Journal:

Plasma Devices and Operations

Year:

2009

Language:

english

File:

PDF, 324 KB

english, 2009

32

Complex regulation of secondary metabolism controlling pathogenicity in the phytopathogenic fungus Alternaria alternata

Takaoka, Shinya, Kurata, Mariko, Harimoto, Yoshiaki, Hatta, Rieko, Yamamoto, Mikihiro, Akimitsu, Kazuya, Tsuge, Takashi

Journal:

New Phytologist

Year:

2014

Language:

english

File:

PDF, 1.46 MB

english, 2014

33

Electrical conductance behavior of thin Ni catalyst films during intermittent direct current magnetron sputtering

Kusumoto, Yuji, Furuta, Hiroshi, Sekiya, Kazuki, Koji, Hirofumi, Hatta, Akimitsu

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2014

Language:

english

File:

PDF, 1.77 MB

english, 2014

34

Local sputter etching by micro plasma jet in SEM

Matra, Khanit, Mizobuchi, Yusuke, Furuta, Hiroshi, Hatta, Akimitsu

Journal:

Year:

2013

Language:

english

File:

PDF, 516 KB

english, 2013

35

Gas sensing properties of W6+–TiO2 thin film prepared by R.F. magnetron sputtering based on PN junction substrate

Zhang, Huijun, Han, Tingyu, Cheng, Jingliang, Harigai, Tooru, Hatta, Akimitsu, Wen, Dianzhong

Journal:

Surface and Coatings Technology

Year:

2013

Language:

english

File:

PDF, 871 KB

english, 2013

36

Radiation damage and electrical properties of ion-implanted chemically vapour deposited diamond

Mori, Yusuke, Deguchi, Masahiro, Eimori, Nobuhiro, Ma, Jing Shing, Hatta, Akimitsu, Nishimura, Kazuhito, Kitabatake, Makoto, Ito, Toshimichi, Hirao, Takashi, Hiraki, Akio

Journal:

Diamond and Related Materials

Year:

1993

Language:

english

File:

PDF, 509 KB

english, 1993

37

[IEEE 2013 6th International Conference on Advanced Infocomm Technology (ICAIT) - Hsinchu, Taiwan (2013.07.6-2013.07.9)] 2013 6th IEEE/International Conference on Advanced Infocomm Technology (ICAIT) - High luminance nano-structured zinc oxide thin film fabrication

Li, Chaoyang, Kawaharamura, Toshiyuki, Wang, Dapeng, Li, Xin, Hatta, Akimitsu

Year:

2013

Language:

english

File:

PDF, 298 KB

english, 2013

38

Investigating the effect of additional gases in an atmospheric-pressure helium plasma jet using ambient mass spectrometry

Oh, Jun-Seok, Furuta, Hiroshi, Hatta, Akimitsu, Bradley, James W.

Journal:

Japanese Journal of Applied Physics

Year:

2015

Language:

english

File:

PDF, 799 KB

english, 2015

39

Comparative Study on Chemical Vapor Deposition of Diamond-Like Carbon Films from Methane and Acetylene Using RF Plasma

Hassan, Md. Kamrul, Pramanik, Bimal Kumar, Hatta, Akimitsu

Journal:

Japanese Journal of Applied Physics

Year:

2006

Language:

english

File:

PDF, 144 KB

english, 2006

40

[IEEE 2006 International Symposium on Discharges and Electrical Insulation in Vacuum - Matsue, Japan (2006.09.25-2006.09.29)] 2006 International Symposium on Discharges and Electrical Insulation in Vacuum - Effect of Thin Aluminum Layer on Fabricating Silicon Micro Cone Structures

Yoshimura, Hiroaki, Kanakusa, Hiroaki, Nakazawa, Kazuki, Hatta, Akimitsu

Year:

2006

Language:

english

File:

PDF, 3.87 MB

english, 2006

41

19.3: Morphology Controlled Single-crystal ZnO Nanostructures Fabricated by a Novel Mist Chemical Vapor Deposition

Li, Chaoyang, Li, Xin, Wang, Dapeng, Kawaharamura, Toshiyuki, Nitta, Noriko, Furuta, Mamoru, Hatta, Akimitsu

Journal:

SID Symposium Digest of Technical Papers

Year:

2013

Language:

english

File:

PDF, 804 KB

english, 2013

42

Homoepitaxial Diamond Synthesis by DC Arc Plasma Jet Chemical Vapor Deposition

Higa, Akira, Hatta, Akimitsu, Ito, Toshimichi, Maehama, Takehiro, Toguchi, Minoru, Hiraki, Akio

Journal:

Japanese Journal of Applied Physics

Year:

1996

File:

PDF, 1.26 MB

1996

43

Nucleation-enhancing treatment for diamond growth over a large-area using magnetoactive microwave plasma chemical vapor deposition

Jeon, Hyeongmin, Wang, Chunlei, Hatta, Akimitsu, Ito, Toshimichi

Journal:

Journal of Applied Physics

Year:

2000

Language:

english

File:

PDF, 754 KB

english, 2000

44

Edge emission observed in heavily boron-doped diamond films epitaxially grown on platinum

Yokota, Yoshihiro, Tachibana, Takeshi, Miyata, Koichi, Kobashi, Koji, Hatta, Akimitsu, Ito, Toshimichi, Hiraki, Akio, Shintani, Yoshihiro

Journal:

Applied Physics Letters

Year:

1998

Language:

english

File:

PDF, 376 KB

english, 1998

45

[IEEE 2008 IEEE 35th International Conference on Plasma Science (ICOPS) - Karlsruhe, Germany (2008.06.15-2008.06.19)] 2008 IEEE 35th International Conference on Plasma Science - UV light sources with microwave excited molecular gas plasmas

Jun-Seok Oh,, Pramanik, Bimal K., Kazumasa Kawamura,, Akimitsu Hatta,

Year:

2008

Language:

english

File:

PDF, 41 KB

english, 2008

46

Highly efficient electron emission from diode-type plane emitters using chemical-vapor-deposited single-crystalline diamond

Ito, Toshimichi, Nishimura, Masaki, Hatta, Akimitsu

Journal:

Applied Physics Letters

Year:

1998

Language:

english

File:

PDF, 263 KB

english, 1998

47

The investigation of defect formation in chemical vapor deposited diamond using photoluminescence by ultraviolet synchrotron radiation

Won, Jaihyung, Hatta, Akimitsu, Ito, Toshimichi, Sasaki, Takatomo, Hiraki, Akio

Journal:

Applied Physics Letters

Year:

1996

Language:

english

File:

PDF, 269 KB

english, 1996

48

Thickness of ITO thin film influences on fabricating ZnO nanorods applying for dye-sensitized solar cell

Li, Xin, Li, Chaoyang, Hou, Shengwen, Hatta, Akimitsu, Yu, Jinhong, Jiang, Nan

Journal:

Composites Part B: Engineering

Year:

2015

Language:

english

File:

PDF, 1.38 MB

english, 2015

49

Diamond-like carbon films from CO source gas by RF plasma CVD method

Yasuoka, Yuki, Harigai, Toru, Oh, Jun-Seok, Furuta, Hiroshi, Hatta, Akimitsu, Suzuki, Tsuneo, Saitoh, Hidetoshi

Journal:

Japanese Journal of Applied Physics

Year:

2015

Language:

english

File:

PDF, 727 KB

english, 2015

50

Probing the transport of plasma-generated RONS in an agarose target as surrogate for real tissue: dependency on time, distance and material composition

Szili, Endre J, Oh, Jun-Seok, Hong, Sung-Ha, Hatta, Akimitsu, Short, Robert D

Journal:

Journal of Physics D Applied Physics

Year:

2015

Language:

english

File:

PDF, 2.29 MB

english, 2015